Hiden TPD

Temperature programmed desorption (TPD) is a powerful tool to study the temperature desorption of molecules from a surface by heating the sample in a linear ramp rate. This technique is used to measure the thermal stability of a material. Electron stimulated desorption (ESD) is another mass spectrometry technique that measures desorbing species from a sample and give information about the bonding energy, radiation sensitivity, and chemisorption. For these measurements, an electron gun is used to create an electron beam which impinges on the sample causing bonds to break and adsorbed species to desorb. Once desorption occurs, a mass spectrometer measures the intensity of the desorbing species.

The Hiden TPD workstation located at Johnson Hall is a complete experimental system for analysis of thermal desorption products by ultrahigh vacuum (UHV) TPD/TDS. The TPD Workstation features a multiport UHV chamber (<5x10-9 Torr) with heated sample stage to 1000 °C.  Temperature control is achieved by PID coupled to a high precision triple filter quadrupole mass spectrometer with digital pulse ion counting detector for ultimate sensitivity and time resolution.

TPD Capabilities:

  • Analysis performed at ultrahigh vacuum (UHV).
  • Preferred sample size is 10 mm x 10 mm x 1 mm.
  • Temperature range is room temp. (RT) to 1000 °C.
  • PID Controller coupled to high precision triple filter quadrupole mass spectrometer with digital pulse ion counting detector for high sensitivity and time resolution.
  • Load-lock chamber for efficient sample exchange and throughput.
  • Linear sample transfer and heater positioning mechanisms for streamlined operation.
  • Multiport UHV chamber for attachment of additional instrumentation (e.g. Ellipsometry, low pressure gas dosing).
  • Low energy electron gun (Kimball Physics ELG-2 gun with EGPS-1022 power supply).
  • Integrated Software control of experimental protocols.


When publishing research involving experiments conducted at the APSCL, please include the following text in the acknowledgements: Part of this research was conducted at the Northwest Nanotechnology Infrastructure, a National Nanotechnology Coordinated Infrastructure site at Oregon State University which is supported in part by the National Science Foundation (grant NNCI-2025489) and Oregon State University.